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A LASER MICROMACHINING SYSTEM FOR WRITING A PATTERN ONTO A SUBSTRATE USING LASER MICROMACHINING AND METHOD.
A LASER MICROMACHINING SYSTEM FOR WRITING A PATTERN ONTO A SUBSTRATE USING LASER MICROMACHINING AND METHOD.
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机译:激光微加工系统,用于使用激光微加工和方法将图案写入基体上。
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摘要
The present invention is related to a system and method for writing a pattern onto a substrate using laser micromachining. According to the invention, individually controllable multiple laser beams are used with a single laser crystal in such a manner that multiple pulses can be applied to the substrate.
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