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COMPOSITION AND METHOD FOR PLANARIZED BIT-PATTERNED MAGNETIC MEDIA

机译:平面位点磁介质的组成和方法

摘要

The present disclosure relates to a planarized bit-patterned magnetic medium that has a magnetic layer, including island regions and trench regions, a first carbon layer applied over the magnetic layer, and a second carbon layer applied over the first carbon layer, wherein the second carbon layer has been removed in the island regions. The first carbon layer may have a lower material removal rate when exposed to chemical-mechanical polishing than the second carbon layer. The present disclosure also relates to a method for planarizing a bit-patterned magnetic medium and a slurry composition for the chemical-mechanical polishing of carbon layers, the slurry composition including an oxidizer component, a catalyst component, a particulate component, and a reaction control component.
机译:本公开涉及一种平面化的位图案化磁性介质,其具有包括岛区域和沟槽区域的磁性层,施加在磁性层上的第一碳层和施加在第一碳层上的第二碳层,其中第二岛区的碳层已被去除。当暴露于化学机械抛光时,第一碳层可以具有比第二碳层更低的材料去除率。本公开还涉及一种用于平坦化位图案化的磁性介质的方法以及用于对碳层进行化学机械抛光的浆料组合物,该浆料组合物包括氧化剂组分,催化剂组分,颗粒组分以及反应控制剂。零件。

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