首页> 外国专利> DISCHARGE AUXILIARY-TYPE LASER APERTURE MACHINING DEVICE AND DISCHARGE AUXILIARY-TYPE LASER APERTURE MACHINING METHOD

DISCHARGE AUXILIARY-TYPE LASER APERTURE MACHINING DEVICE AND DISCHARGE AUXILIARY-TYPE LASER APERTURE MACHINING METHOD

机译:放电辅助型激光孔径加工装置及放电辅助型激光孔径加工方法

摘要

Provided is a discharge auxiliary-type laser aperture machining device by which through holes are formed in an insulation substrate by laser light emission, and the shape of the through holes is adjusted using the discharge phenomenon between a first and second electrode, wherein the discharge auxiliary-type laser aperture machining device comprises a laser light source for emitting laser light, a homogenizer for forming a flat-top beam from the laser light, and a reduced projection system, and the discharge auxiliary-type laser aperture machining device is characterized in that the reduced projection system has a transfer lens for transferring to the insulation substrate an image surface generating the flat-top laser beam which was formed by the homogenizer and an image generated on the image surface.
机译:提供了一种放电辅助型激光孔径加工装置,该放电辅助型激光孔径加工装置通过激光的发射在绝缘基板上形成通孔,并利用第一电​​极和第二电极之间的放电现象来调节通孔的形状,其中,式的激光光阑加工装置包括:用于发射激光的激光源;用于从该激光形成平顶光束的均化器;以及缩小的投影系统;放电辅助型的激光光阑加工装置的特征在于:缩小投影系统具有用于将生成由均化器形成的平顶激光束的图像表面和在该图像表面上生成的图像传输至绝缘基板的传输透镜。

著录项

  • 公开/公告号WO2014199775A1

    专利类型

  • 公开/公告日2014-12-18

    原文格式PDF

  • 申请/专利权人 ASAHI GLASS COMPANY LIMITED;

    申请/专利号WO2014JP63180

  • 发明设计人 ONO MOTOSHI;

    申请日2014-05-19

  • 分类号B23K26/382;B23H7/38;B23K26/04;B23K26/064;B23K26/066;B23K26/60;B26F3;

  • 国家 WO

  • 入库时间 2022-08-21 15:09:34

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