公开/公告号EP1320875B1
专利类型
公开/公告日2015-08-12
原文格式PDF
申请/专利权人 TOKYO ELECTRON LTD;RENESAS ELECTRONICS CORP;PANASONIC CORP;DAIKIN IND LTD;CANON ANELVA CORP;SANYO ELECTRIC CO;HITACHI INT ELECTRIC INC;SONY CORP;KANTO DENKA KOGYO KK;NAT INST OF ADVANCED IND SCIEN;
申请/专利号EP20010970182
发明设计人 SEKIYA AKIRAC/O NAT. INST. OF ADVANCED;TOMIZAWA GINJIRO;MITSUI YUKIC/O RESEARCH INSTITUTE OF INNOVATIVE;FUKAE KATSUYAC/O SHIBUKAWA LABORATORY;
申请日2001-09-21
分类号B08B7/00;C09K13/00;H01L21/3065;H01L21/311;H01L21/3213;C23C16/44;
国家 EP
入库时间 2022-08-21 15:09:17