首页>
外国专利>
DEVICE FOR THE TREATMENT OF SURFACES WITH A PLASMA GENERATED BY AN ELECTRODE OVER A SOLID DIELECTRIC VIA A DIELECTRIC BARRIER GAS DISCHARGE
DEVICE FOR THE TREATMENT OF SURFACES WITH A PLASMA GENERATED BY AN ELECTRODE OVER A SOLID DIELECTRIC VIA A DIELECTRIC BARRIER GAS DISCHARGE
展开▼
机译:通过介电阻挡层气体放电在固态介电体上处理电极产生的等离子体的表面的装置
展开▼
页面导航
摘要
著录项
相似文献
摘要
The invention relates to a device for treatment of surfaces with a plasma (2) generated by an electrode (1) over a solid dielectric (3) via a dielectrically impeded gas discharge, wherein the device has an effective surface (4) which is immediately adjacent to the plasma (2) during the treatment, wherein the form of the effective surface can be reversibly changed.
展开▼