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DEVICE FOR THE TREATMENT OF SURFACES WITH A PLASMA GENERATED BY AN ELECTRODE OVER A SOLID DIELECTRIC VIA A DIELECTRICALLY IMPEDED GAS DISCHARGE
DEVICE FOR THE TREATMENT OF SURFACES WITH A PLASMA GENERATED BY AN ELECTRODE OVER A SOLID DIELECTRIC VIA A DIELECTRICALLY IMPEDED GAS DISCHARGE
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机译:介电性气体放电通过固体介电体在电极上产生的等离子体处理表面的装置
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摘要
The invention relates to a device for treatment of surfaces with a plasma (2) generated by an electrode (1) over a solid dielectric (3) via a dielectrically impeded gas discharge, wherein the device has an effective surface (4) which is immediately adjacent to the plasma (2) during the treatment, wherein the form of the effective surface can be reversibly changed.
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