首页> 外国专利> DEVICE FOR THE TREATMENT OF SURFACES WITH A PLASMA GENERATED BY AN ELECTRODE OVER A SOLID DIELECTRIC VIA A DIELECTRICALLY IMPEDED GAS DISCHARGE

DEVICE FOR THE TREATMENT OF SURFACES WITH A PLASMA GENERATED BY AN ELECTRODE OVER A SOLID DIELECTRIC VIA A DIELECTRICALLY IMPEDED GAS DISCHARGE

机译:介电性气体放电通过固体介电体在电极上产生的等离子体处理表面的装置

摘要

The invention relates to a device for treatment of surfaces with a plasma (2) generated by an electrode (1) over a solid dielectric (3) via a dielectrically impeded gas discharge, wherein the device has an effective surface (4) which is immediately adjacent to the plasma (2) during the treatment, wherein the form of the effective surface can be reversibly changed.
机译:本发明涉及一种用于处理在固体电介质( 3 )上由电极( 1 )产生的等离子体( 2 )表面的装置。 )通过介电阻止气体放电,其中该设备的有效表面( 4 )在处理过程中与等离子体( 2 )直接相邻,其中有效表面可以可逆地改变。

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