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METHOD FOR PREPARING GALLIUM NITRIDE-BASED LIGHT-EMITTING DIODE, AND GALLIUM NITRIDE-BASED LIGHT-EMITTING DIODE

机译:氮化镓基发光二极管的制备方法及氮化镓基发光二极管

摘要

Disclosed are a method for preparing a gallium nitride (GaN)-based light-emitting diode (LED), and the gallium nitride-based light-emitting diode. The method comprises: sequentially forming an N-type gallium nitride buffer layer (42), an N-type gallium nitride layer (43), a multi-quantum well layer (44), and a P-type gallium nitride layer (45) on a substrate (41); forming an additional conducting layer (461) on the P-type gallium nitride layer (45); forming a current blocking layer (46) on the additional conducting layer (461) and performing etching; forming a conducting layer (47), and performing patterning to form an N-type gallium nitride platform; and forming an electrode layer (48) and a passivation layer (49). An additional conducting layer used as a protective layer is formed before a current blocking layer is formed, thereby avoiding the problem of a voltage rise because a reactive power and gas ions generated when the current blocking layer is formed affect a surface of a P-type gallium nitride layer, and ensuring the quality of a film of the current blocking layer.
机译:公开了一种用于制备基于氮化镓(GaN)的发光二极管(LED)的方法和基于氮化镓的发光二极管。该方法包括:顺序地形成N型氮化镓缓冲层(42),N型氮化镓层(43),多量子阱层(44)和P型氮化镓层(45)。在基板(41)上;在P型氮化镓层(45)上形成附加的导电层(461);在附加导电层(461)上形成电流阻挡层(46)并进行蚀刻;形成导电层(47),并进行构图以形成N型氮化镓平台。形成电极层(48)和钝化层(49)。在形成电流阻挡层之前形成用作保护层的附加导电层,从而避免了电压升高的问题,因为在形成电流阻挡层时产生的无功功率和气体离子会影响P型表面氮化镓层,并确保电流阻挡层的成膜质量。

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