首页> 外国专利> RESIST PATTERN FORMING METHOD, RESIST PATTERN, CROSSLINKABLE NEGATIVE CHEMICAL AMPLIFICATION RESIST COMPOSITION FOR ORGANIC SOLVENT DEVELOPMENT, RESIST FILM AND RESIST-COATED MASK BLANKS

RESIST PATTERN FORMING METHOD, RESIST PATTERN, CROSSLINKABLE NEGATIVE CHEMICAL AMPLIFICATION RESIST COMPOSITION FOR ORGANIC SOLVENT DEVELOPMENT, RESIST FILM AND RESIST-COATED MASK BLANKS

机译:抗蚀剂形成方法,抗蚀剂,可交联负性化学增幅剂,有机溶剂显影用抗蚀剂组合物,抗蚀剂膜和涂有抗蚀剂的面膜

摘要

A resist pattern forming method contains: in the following order, (1) forming a resist film by using a negative chemical amplification resist composition containing (A) a polymer compound having a repeating unit represented by formula (1) as defined in the specification, (B) a compound capable of generating an acid upon irradiation with an actinic ray or radiation and (C) a crosslinking agent capable of crosslinking the polymer compound (A) by an action of an acid; (2) exposing the resist film, so as to form an exposed resist film; and (4) developing the exposed resist film by using a developer containing an organic solvent.
机译:抗蚀剂图案形成方法包括以下步骤:(1)通过使用负化学放大抗蚀剂组合物形成抗蚀剂膜,所述负化学放大抗蚀剂组合物包含(A)具有如说明书中定义的式(1)表示的重复单元的高分子化合物, (B)在光化射线或放射线照射下能够产生酸的化合物,以及(C)在酸的作用下能够使高分子化合物(A)交联的交联剂。 (2)曝光抗蚀剂膜,以形成曝光的抗蚀剂膜; (4)通过使用含有有机溶剂的显影剂对曝光的抗蚀剂膜进行显影。

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