THREE-AXIS MICRO GYROSCOPE HAVING RING SPRING

摘要

Disclosed is a three-axis micro gyroscope having a ring spring. The three-axis micro gyroscope of the present invention comprises: a main spring part; a driving part; an x mass part; an y mass part; a z mass part; and a sensing part. The main spring part is disposed on x-y planes in a closed curve shape including a reference point and has elasticity. The driving part contracts and expands the main spring part with respect to the x axis direction and the y axis direction in a manner complementary to each other. The x mass part, coupled to the main spring part, moves in the y axis direction depending on the contraction and expansion of the main spring part, and can be vibrated and shaken in the z axis direction. The y mass part, coupled to the main spring part, moves in the x axis direction depending on the contraction and expansion of the main spring part, and can be vibrated and shaken in the z axis direction. The z mass part comprises an x vibration mass means and an y vibration mass means, wherein the x vibration mass means moves in the y axis direction depending on the contraction and expansion of the main spring part, and can be vibrated and shaken in the x axis direction, and the y vibration mass means moves in the x axis direction depending on the contraction and expansion of the main spring part, and can be vibrated and shaken in the y axis direction. The sensing part senses vibration shaking of the x mass part, the y mass part and the z mass part. The three-axis micro gyroscope of the present invention having the above structure is capable of effective measurement of rotational movements for all three of the x, y and z axes.