Three-axis micro gyroscope with ring spring

摘要

Disclosed is a three-axis micro gyroscope having a ring spring. The three-axis micro gyroscope of the present invention comprises: a main spring part; a driving part; an x mass part; an y mass part; a z mass part; and a sensing part. The x mass part moves in the y axis direction depending on the contraction and expansion of the main spring part. The y mass part moves in the x axis direction depending on the contraction and expansion of the main spring part. The z mass part comprises an x vibration mass means and an y vibration mass means. The sensing part senses vibration shaking of the x mass part, the y mass part and the z mass part. The three-axis micro gyroscope of the present invention is capable of effective measurement of rotational movements for all three of the x, y and z axes.