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POLYCRYSTALLINE SILICON THICK FILMS FOR PHOTOVOLTAIC DEVICES OR THE LIKE, AND METHODS OF MAKING SAME
POLYCRYSTALLINE SILICON THICK FILMS FOR PHOTOVOLTAIC DEVICES OR THE LIKE, AND METHODS OF MAKING SAME
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机译:用于光伏器件或类似器件的多晶硅厚膜及其制造方法
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摘要
A method of manufacturing a polycrystalline silicon film includes: depositing a catalyst layer including nickel and depositing nickel nanoparticles on a substrate; exposing the catalyst layer and the nanoparticles to at least silane gas; and heat treating the substrate coated with the catalyst layer and the nanoparticles during at least part of the exposing to silane gas in growing a silicon based film on the substrate.
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