ZINC TARGET INCLUDING FLUORINE, METHOD OF FABRICATING ZINC NITRIDE THIN FILM USING SAME, AND METHOD OF FABRICATING THIN FILM TRANSISTOR

摘要

Disclosed is a zinc target including fluorine, a method of fabricating a zinc nitride thin film using the same, and a method of fabricating a thin film transistor. The disclosed method of fabricating a zinc nitride thin film including fluorine comprises the steps of mounting a fluorine contained zinc target in a sputtering chamber; supplying nitrogen gas and inert gas to the chamber; and forming the fluorine contained zinc nitride thin film on a substrate.;COPYRIGHT KIPO 2015