Method for manufacturing free standing thin film and thin film manufactured by the method

摘要

The invention process for producing a free-standing thin film capable of producing a free-standing thin film with a thin thickness and to a free-standing thin film to be produced by it. Method for producing a free-standing thin film according to the present invention: (a) a step of preparing a substrate hole is formed, (b) and forming a liquid PDMS is applied to the hole formed in the liquid PDMS substrate, (c) liquid PDMS film includes the step of transition of the solid oxide films. Method for producing a free-standing thin film according to the present invention by applying a non-liquid phase in the polymerization of the PDMS substrate is a hole formed in the oxide film, and this transition, forming a thin film through spin coating as in the prior art, and the sacrificial layer (sacrificial layer) the removal process and it is possible to form a thin, free-standing thin film thickness, even if you do not perform such as to transfer the thin film to another substrate (transfer) easily in the hole of the substrate. ;