VOLTAGE BIASED PULL ANALOG INTERFEROMETRIC MODULATOR WITH CHARGE INJECTION CONTROL

摘要

The present disclosure is directed to drive the 3- terminal electrical mechanical systems (EMS) device systems for , and provides methods and apparatus . The drive systems and methods described herein are switched capacitor charge injection is configured to transmit a desired amount of charge to the device to be isolated to result in the isolated operation and the device is desired optical , electrical or mechanical effect of a single EMS device and a circuit . Charge injection circuit may comprise an operational amplifier , can be coupled such that EMS devices are placed in the feedback path of the operational amplifier . ;