METHOD FOR FORMING Ti-CONTAINING FILM BY PEALD USING TDMAT OR TDEAT

摘要

A method for forming a Ti-containing film on a substrate by plasma enhanced atom layer deposition (PEALD) by using tetrakise (dimethyl amino) titamium (TDMAT) or tetrakise (diethyl amino) titanium (TDEAT) comprises the steps of: applying TDMAT and/or TDEAT to a reaction space in which a substrate is arranged by pulse; continuously applying NH_3-free reaction gas to the reaction space; applying RF power to the reaction space by pulse, wherein the pulse of TDMAT and/or TDEAT and pulse of RF power is not overlapped, and repeating the steps for forming Ti-containing film on the substrate.;COPYRIGHT KIPO 2015