ZnO-BASED SPUTTERING TARGET, ORGANIC LIGHT EMITTING DEVICE HAVING TRANSPARENT ELECTRODE DEPOSITED SAME AND MANUFACTURING METHOD THEREOF

摘要

The present invention relates to a ZnO-based sputtering target and an organic light emitting device having a transparent electrode deposited the same. More specifically, the said invention relates to a ZnO-based sputtering target capable of DC sputtering and deposition of a transparent electrode capable of improving a light emitting efficiency of an organic light emitting device and to an organic light emitting device having a transparent electrode deposited the same, and to a manufacturing method thereof. To achieve this, the present invention provides a ZnO-based sputtering target, an organic light emitting device having a transparent electrode deposited the same, and a manufacturing method thereof wherein the ZnO-based sputtering target comprises: a sintered object composed of zinc oxide doped with 0.05-5 parts by weight of gallium oxide and 0.1-3 parts by weight of aluminum oxide with respect to zinc oxide; and a backing plate bonded to a rear surface of the sintered object to support the sintered object.;COPYRIGHT KIPO 2015