首页> 外国专利> APPARATUS AND METHOD FOR DEPOSITING MULTIPLE COATING MATERIALS IN A COMMON PLASMA COATING ZONE

APPARATUS AND METHOD FOR DEPOSITING MULTIPLE COATING MATERIALS IN A COMMON PLASMA COATING ZONE

机译:用于在公共等离子涂层区域中沉积多种涂层材料的设备和方法

摘要

An apparatus and method for coating a substrate moved along a path of travel through the apparatus. A plasma source issues a plasma jet into which a first reagent is injected from a discharge orifice located upstream of the jet. A second reagent is injected into the jet from a discharge orifice located downstream of the jet. A controller is configured to regulate the flow of the first reagent according to a first set of parameters and regulate the flow of the second reagent according to a second set of parameters. As a result, the first and second reagents are applied to the substrate to form at least one layer of a coating on the substrate.
机译:一种用于涂覆沿通过该设备的行进路径移动的基板的设备和方法。等离子体源发出等离子体射流,从位于该射流上游的排放孔向其中注入第一试剂。从位于喷嘴下游的排放孔将第二试剂注入喷嘴。控制器被配置为根据第一组参数调节第一试剂的流量,并根据第二组参数调节第二试剂的流量。结果,将第一试剂和第二试剂施加到基材上以在基材上形成至少一层涂层。

著录项

  • 公开/公告号KR20150103764A

    专利类型

  • 公开/公告日2015-09-11

    原文格式PDF

  • 申请/专利权人 EXATEC L.L.C.;

    申请/专利号KR20157023296

  • 发明设计人 GASWORTH STEVEN M.;

    申请日2008-05-19

  • 分类号C23C16/513;C23C16/44;C23C16/455;C23C16/52;

  • 国家 KR

  • 入库时间 2022-08-21 14:59:14

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号