OPTICAL ATOMIC FORCE MICROSCOPE USING ABSOLUTE DISPLACEMENT SENSOR

摘要

The present invention relates to an optical scanning probe microscopy which comprises: an XY-axis nanoscanner transporting a sample in a horizontal direction; Z-axis nanoscanner head part scanning a surface of the sample with a cantilever; an optical sensor measuring a relative displacement of the Z-axis nanoscanner head part; a frame supporting the Z-axis nanoscanner; and an absolute displacement sensor measuring the absolute displacement of the nanoscanner head part which is provided one side of the Z-axis nanoscanner. The displacement measurement of the Z-axis nanoscanner head part is carried out by an optical sensor or the absolute displacement sensor according to the height in which a surface configuration of a sample to measure has. Therefore, it is possible to acquire more precise configuration information by measuring the absolute displacement of the Z-axis nanoscanner by additionally using a strain gauge sensor in addition to the optical sensor of the scanning probe microscopy, and also by removing measurement error due to non-linearity of the Z-axis nanoscanner generated when acquiring the configuration information by using an existing control controlling output value.