Optical Atomic Force Microscope Using Absolute Displacement Sensor

摘要

An embodiment is an optical atomic force microscope, comprising: an XY-axis nano-scanner for moving a sample in a horizontal direction; a Z-axis nano-scanner head for scanning a surface of the sample with a cantilever; Axis, a frame supporting the Z-axis nano-scanner, and an absolute displacement sensor for measuring an absolute displacement of a nano-scanner head provided at one side of the Z-axis nano-scanner, wherein the displacement measurement of the Z- And is performed by the optical sensor or the absolute displacement sensor according to the height of the sample surface shape. Therefore, in addition to the optical sensor of the atomic microscope, the absolute displacement of the Z-axis nano-scanner is measured using a strain gauge sensor, and the nonlinearity of the Z-axis nano-scanner generated when the shape information is obtained using the conventional control- Thereby eliminating the measurement error caused by the error, and more accurate shape information can be obtained.