METHOD FOR PATTERNING A THIN FILM BY CONTROLLED CRACKING AND THIN FILM PATTERNING STRUCTURE THEREOF

摘要

PURPOSE: A thin film patterning method and a thin film patterning structure thereof are provided to offer a micro manufacturing technique for forming a step-shaped structure. CONSTITUTION: One or more thin films are formed on a material. A crack is generated by one or more notches by forming a plurality of the notches on the thin film. A predetermined pattern is formed on the thin film by controlling the progress of the generated crack. One end of the notch has a tip of a minute structure. An acute angle is formed according to membrane stress between the thin film and the material.