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CALIBRATION METHOD AND FLOW-RATE MEASUREMENT METHOD FOR FLOW-RATE CONTROLLER OF GAS SUPPLYING APPARATUS
CALIBRATION METHOD AND FLOW-RATE MEASUREMENT METHOD FOR FLOW-RATE CONTROLLER OF GAS SUPPLYING APPARATUS
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机译:供气装置流量控制器的标定方法和流量测量方法
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摘要
In a gas supply device supplying many different gases to a gas use portion through many flow rate controllers, a flow rate controller calibration unit includes a build-up tank with inner volume, an inlet side on-off valve and an outlet side on-off valve V2 of the tank, and a gas pressure detector and a gas temperature detector for gas inside the tank, joined in a branched form to a gas supply line, with the valve V2 connected to vacuum. The calibration unit is used to calibrate a flow rate controller based on performing a first measurement of gas temperature and pressure inside the tank, and then building-up gas into the tank, and then performing a second measurement of gas temperature and pressure, and from respective measured values, calculating gas flow rate Q and by comparing a set gas flow rate and calculated gas flow rate Q, performing flow rate calibration.
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