PATTERNING APPARATUS USING LOCALIZED SURFACE PLASMON RESONANCE OF METAL NANO-PARTICLES, AND PATTERNING METHOD USING SAME

摘要

Disclosed are a patterning apparatus using localized surface plasmon resonance (LSPR) of metal nano-particles, and a patterning method using the same. According to an embodiment of the present invention, the patterning apparatus (100) which forms a fine pattern on a substrate using LSPR of metal nano-particles comprises: an optical lens unit (110) which is separated from the top of a substrate with a predetermined distance, and causes LSPR by irradiating metal nano-particles (101) fixed to the top of the substrate with light; the substrate (120) which is a given distance away from the optical lens unit (110), and on which the metal nano-particles (101) are placed; a fixing device unit (130) which is installed in the substrate (120), and fixes the metal nano-particles (101) located on the top of the substrate; and a driving unit (140) for moving the optical lens unit (110) or the substrate (120) horizontally.;COPYRIGHT KIPO 2015