COMPOSITE OF PASSIVATION LAYER, PASSIVATION METHOD, THIN FILM TRANSISTOR AND METHOD FOR MANUFACTURING THIN FILM TRANSISTOR

摘要

The present invention is related to a composite of a passivation layer, a passivation method, thin-film transistors, and a method to manufacture thin-film transistors. The composite of a passivation layer according to an embodiment of the present invention may include yttrium as well as monovalent, bivalent, trivalent, and quadrivalent metal for doping the passivation layer.;COPYRIGHT KIPO 2015