miss the cut substrates grown on a flat non-polar m-plane nitride films

摘要

Miss board cut of a nonpolar III- nitride film grown on each phase, in order to suppress the surface wave, It is provided. The film surface morphology is improved to have a miss each cut toward the axial direction, including a- miss cut angle of less than 30 toward the direction of the cut angle and the a- axis misses than 0.15 toward the axial a- ; board, Ms. cut, morphology, a- axis, surface wave