SELF-ASSEMBLING METHOD OF MULTI-LAYERED NANORING BY VERTICALLY CORRELATED DROPLET EPITAXY

摘要

According to an aspect of the present invention, provided is a self-assembling method of a multi-layered nanoring by a vertically correlated droplet epitaxy, comprising the steps of: forming a Ga nano-droplet by depositing the Ga nano-droplet having three monolayers on a surface sample of a GaAs substrate by a droplet epitaxy process under an AS starvation condition; depositing, after the step of forming the Ga nano-droplet, the same amount of the Ga nano-droplet as the one in the step of forming the Ga nano-droplet on the surface sample of the GaAs substrate, on which the Ga nano-droplet is formed, by the droplet epitaxy process under the AS starvation condition to be crystallized into a nanoring; and forming a nano-droplet/nanoring hybrid structure, after the step of forming the nanoring, by stopping growth for ten minutes to decrease an As background pressure in a state that an As cell shutter is closed in the droplet epitaxy process, and vertically depositing the Ga nano-droplet having three monolayers.;COPYRIGHT KIPO 2015