5 SINGLE ARRAY SENSOR FOR DETECTING 5 KINDS OF VOCs IN INDOOR AIR AND MANUFACTURING METHOD THEREOF

摘要

The present invention is based on a single array, rather than a multi-array, for the detection of multiple volatile organic compounds, and in particular, to provide a sensor capable of providing a sensor with improved discrimination and sensitivity to five kinds of volatile organic compounds in indoor air The present invention provides a method of manufacturing a single array sensor for sensing the fraction of five volatile organic compounds and a single array sensor manufactured thereby. According to an aspect of the present invention, there is provided a method of manufacturing a semiconductor device, comprising: preparing a substrate on which a conductive electrode pattern is formed; Providing a chemical coating solution coated on the substrate to provide fractional performance of volatile organic compounds (VOCs); Stirring the chemical coating solution; A coating step of coating the agitated chemical coating solution; And a post-treatment step of drying the substrate on which the chemical coating solution is coated. The present invention also provides a method of manufacturing a single array sensor for the fractionation detection of volatile organic compounds in indoor air.