The exhaust device according to the present invention is an exhaust device for evacuating a gas in the ingot growing equipment through a gas exhaust pipe passing through an ingot growing equipment, the main exhaust pipe being connected to the gas exhaust pipe and serving as a passage of the gas; A filter for filtering the foreign matter of the gas moved through the main exhaust pipe; A vacuum pump for sucking the gas passed through the filter; And atmospheric supply means for injecting the air into the main exhaust pipe, wherein the atmospheric supply means includes a main exhaust pipe branched from the main exhaust pipe, an atmospheric opening / closing valve for opening / closing the main exhaust pipe, And an atmospheric supply unit for supplying the atmospheric air. With the exhaust device according to the present invention, ingot production efficiency and production quality can be improved, and the risk of the exhaust pipe cleaning worker can be reduced.
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