INGOT GROWING CONTROL SYSTEM CAPABLE OF PRECISELY MEASURING AND CONTROLLING THE LENGTH AND GROWING SPEED OF AN INGOT DURING AN INGOT GROWING PROCESS AND AN INGOT GROWING APPARATUS INCLUDING THE SAME

摘要

PURPOSE: An ingot growing control system and an ingot growing apparatus including the same are provided to use direct measurement data with respect to the length and growing speed of an ingot, thereby improving productivity by reducing errors and eliminating trial and error for finding a factor value of a control part.;CONSTITUTION: A laser displacement measurement sensor is installed in one or more places among the outside, inside, and lateral surface of a chamber(110). The laser displacement measurement sensor is arranged in the upper side of a pulling chamber in the outside. The growing speed or length of an ingot is directly measured by measuring the distance with the upper surface of a seed chuck(152) where a seed is installed.;COPYRIGHT KIPO 2012