Method of forming biochips with non-organic contact pads for improved heat management

摘要

A method of making a biochip (100) comprising: forming a plurality of first contact pads (117; 303) on a first substrate (101; 301); Depositing a passivation layer (121; 307) over and between the plurality of first contact pads (117; 303) on the first substrate (101; 301); Depositing and planarizing an oxide layer (123; 309) over the passivation layer (121; 307) on the first substrate (101; 301); Fusing the oxide layer (123; 309) on the first substrate (101; 301) with a transparent substrate (101; 301); Etching a back surface of the first substrate according to a pattern to form microfluidic channels (111, 113, 115, 313, 315, 317) exposing some of the plurality of first contact pads (117, 303); Forming a plurality of second contact pads (119; 353) on a second substrate (105, 351); Depositing a protective layer (357) over the plurality of second contact pads on the second substrate (105, 351); Forming through holes (107, 109, 359, 361) in the second substrate (105, 351); Removing the protective layer (357); Fusing the first substrate (101, 301) to the second substrate (105, 351) such that the microfluidic channels (11, 113, 115, 313, 315, 317) have different contact pads of the first and second contact pads (117, 303, 119) 353) on their inner surfaces; and passing biomaterials through the microfluidic channels (111, 113, 115; 313, 315, 317) in the first substrate (101; 301), the biomaterials attaching to the first and second contact pads (117; 303).