Electron microscope, a method for adjusting the observation of the electron microscope and an observation method with the use of the electron microscope

摘要

Be it an automatic process for adjusting an observation, in order to promote the analysis of an image, and a method for observing a sample by automatically setting a structure of a sample in a an observation method by means of the electron microscope, as well as an electron microscope is provided with an automatic adjustment function. The method includes a step of exposing a fixed position in an observation area with an intermittent pulsed electron beam; a step of: detecting a time variation of an emission electron from the sample by the intermittent electron beam; and a step of adjusting the observation of the electron microscope from the rate of change of the emission electron.