Brief description of embodiments of a pattern on the surface of a block of a substrate using a block copolymers

摘要

The present invention relates to a method of implementation of a pattern on the surface of a substrate comprising the following steps: - a step (102) of depositing a layer of resin (3) to the surface of the substrate (1); - a step (103) of an embodiment of a pattern in the resin (4) to the surface of a substrate (1); - a step (9) of depositing a layer of a block copolymer (9), characterized in that it comprises in addition, a step (104) of hardening of the pattern in the resin (4) by the creation of a layer of amorphous carbon (5) to the surface of the pattern in the resin (4).