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High quality large scale single and multilayer graphene production by chemical vapor deposition

机译:通过化学气相沉积生产高质量的大规模单层和多层石墨烯

摘要

Systems and methods for synthesizing continuous graphene sheets are provided. The systems and methods include passing a catalyst substrate through a heated chemical vapor deposition chamber and exposing the substrate to a reaction gas mixture of hydrogen and hydrocarbon at a preselected location within the chamber. The reaction gas mixture can include hydrogen having a partial pressure of between about 0 Torr and 20 Torr, hydrocarbon having a partial pressure of between about 20 mTorr and about 10 Torr, and one or more buffer gases. The buffer gases can include argon or other noble gases to maintain atmospheric pressure within the chemical deposition chamber.
机译:提供了用于合成连续石墨烯片的系统和方法。该系统和方法包括使催化剂基质通过加热的化学气相沉积室,并使该基质在室内预定位置处暴露于氢和烃的反应气体混合物中。反应气体混合物可包括分压在约0Torr至20Torr之间的氢气,分压在约20mTorr至约10Torr之间的烃和一种或多种缓冲气体。缓冲气体可包括氩气或其他稀有气体,以维持化学沉积室内的大气压力。

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