HIGH QUALITY LARGE SCALE SINGLE AND MULTILAYER GRAPHENE PRODUCTION BY CHEMICAL VAPOR DEPOSITION

摘要

Systems and methods for synthesizing continuous graphene sheets are provided. The system and method include passing a catalyst substrate through a heated chemical vapor deposition chamber and exposing the substrate to a reaction gas mixture comprising hydrocarbons and hydrogen at preselected locations inside the chamber. The reaction gas mixture may include hydrogen having a partial pressure of about 0 Torr to 20 Torr, hydrocarbon having a partial pressure of about 20 mTorr to about 10 Torr, and one or more buffer gases. The buffer gas may contain argon or other inert gas to maintain atmospheric pressure in the chemical vapor deposition chamber.