Method for manufacturing tips and probes for a STM or an AFM

摘要

The present invention is related to full metal probes which have proven their suitability for electrical atomic force microscopy. Such probes could be fabricated cheaper if one reduces the number of steps and processing time. Therefore a manufacturing method is developed which allows manufacturing full metal probes with only two lithography steps. The etching of thin membranes is dropped which substantially reduces the processing time, as only topside processing is required. The probes and tips can be peeled off from the wafer due to a special metallization procedure. IMAGE