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IMPROVED METHOD FOR THE PRODUCTION OF SUSPENDED ELEMENTS WITH DIFFERENT THICKNESSES FOR MEMS AND NEMS STRUCTURE
IMPROVED METHOD FOR THE PRODUCTION OF SUSPENDED ELEMENTS WITH DIFFERENT THICKNESSES FOR MEMS AND NEMS STRUCTURE
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机译:用于MEMS和NEMS结构的具有不同厚度的悬浮元件的生产方法的改进
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摘要
Method for making a N/MEMS device including a structure provided with an active part having a first suspended element and a second suspended element with different thicknesses, the method comprising the following steps of: forming, in a first substrate (100), a sacrificial zone (105), transferring a given layer onto the sacrificial zone, defining in said given layer a first suspended element facing the first sacrificial zone, defining a second suspended element in the first substrate and said given layer, releasing at least the first suspended element.
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