DEVICE AND STRUCTURE FOR BULK FINFET TECHNOLOGY

摘要

A lateral double-diffused MOS (LDMOS) bulk finFET device for high-voltage operation includes a first-well region and two or more second-well regions formed on a substrate material and one or more non-well regions including substrate material. The non-well regions are configured to separate well regions of the second-well regions. A source structure is disposed on a first fin that is partially formed on the first-well region. A drain structure is disposed on a second fin that is formed on a last one of the second-well regions. One or more dummy regions are formed on the one or more non-well regions. The dummy regions are configured to provide additional depletion region flow paths including vertical flow paths for charge carriers to enable the high-voltage operation.