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FILM THICKNESS CONTROL METHOD FOR MULTILAYER OPTICAL FILM, MANUFACTURING METHOD FOR MULTILAYER OPTICAL FILM, AND SPUTTERING DEVICE FOR MULTILAYER OPTICAL FILM
FILM THICKNESS CONTROL METHOD FOR MULTILAYER OPTICAL FILM, MANUFACTURING METHOD FOR MULTILAYER OPTICAL FILM, AND SPUTTERING DEVICE FOR MULTILAYER OPTICAL FILM
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机译:多层光学膜的膜厚控制方法,多层光学膜的制造方法以及多层膜的溅射装置
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摘要
PROBLEM TO BE SOLVED: To provide a film thickness control method such that when a multilayer optical film is formed, respective optical films are made to have film thicknesses close to target values in a length direction and a width direction of a base material.SOLUTION: A control method for a film thickness of a multilayer optical film comprises the processes of: preparing a regression equation representing relation between film thicknesses of optical films and optical characteristic values of a multilayer optical film which are obtained through regressive analysis of a theoretical optical characteristic value group of the multilayer optical film to which a combination of the film thicknesses of the optical films is allocated; preparing a model equation representing relation between variation amounts of manufacture parameters and variation amounts of the film thicknesses of the optical films; finding measured values by measuring optical characteristic values at a plurality of places in the width direction of the formed multilayer optical film; calculating estimated film thickness deviation amounts for the plurality of places in the width direction by applying the measured values to the regression equation; calculating adjustment amounts of the manufacture parameters for a plurality of width-directional places needed to put the film thickness deviation amounts of the respective optical films closer to 0 by applying the estimated film thickness deviation amounts to the model equation; and dividing the manufacture parameters into the plurality of width-directional places based upon the adjustment amounts and changing the manufacture parameters.SELECTED DRAWING: Figure 3
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