DEFECT CORRECTION DEVICE AND DEFECT CORRECTION METHOD FOR SUBSTRATE AND DEFECT CORRECTION PART STRUCTURE FOR SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To appropriately correct the disconnected portion of an electrode pattern formed on a substrate by using paste-like conductive materials.SOLUTION: A defect correction device 100 includes: a squeegee probe 10; a Z stage 120; an XY stage 110; and a control device 200. The squeegee probe 10 shapes paste 4 applied to a disconnected portion 3. The control device 200 controls a Z stage 120 such that a distance D between the squeegee probe 10 and electrode patterns 21 and 22 becomes a predetermined value Dth, and controls the XY stage 110 to scan the squeegee probe 10 in a state that the distance D is held to be the predetermined value Dth. The predetermined value Dth is determined in accordance with a contraction amount by the burning of the paste 4.SELECTED DRAWING: Figure 8