NANOIMPRINT LIQUID MATERIAL, METHOD FOR MANUFACTURING NANOIMPRINT LIQUID MATERIAL, METHOD FOR MANUFACTURING HARDENED MATERIAL PATTERN, METHOD FOR MANUFACTURING OPTICAL COMPONENT, METHOD FOR MANUFACTURING CIRCUIT BOARD, AND METHOD FOR MANUFACTURING ELECTRONIC COMPONENT

摘要

PROBLEM TO BE SOLVED: To increase the yield of a nanoimprint process.;SOLUTION: In a nanoimprint liquid material, the number concentration of particles of 0.07 μm or larger in particle diameter is less than 310/mL.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2016,JPO&INPIT