ION SOURCE, SUSCEPTOR, SUSPENSION MECHANISM, ION SOURCE CONVEYANCE SYSTEM AND ION SOURCE CONVEYANCE METHOD

摘要

PROBLEM TO BE SOLVED: To convey an ion source while surely bringing it into a stable state.SOLUTION: The ion source comprises: a housing 10 including an ion lead-out opening O; an electrode hold member 50 which is connected to the housing 10 and holds a plurality of electrodes; and a lower roller 21 and an upper roller 22 which are fitted to the housing 10 that is in a fitting attitude, in a removable manner. In a standing attitude including the fitting attitude in the state of removal from a device body 102, only the lower roller 21 fitted to the housing 10 is placed on a horizontal rail 23 so as to be rolled. In a falling attitude of falling from the standing attitude and reducing a height dimension, on the other hand, both the lower roller 21 and the upper roller 22 which are fitted to the housing 10 are placed on the horizontal rail 23.SELECTED DRAWING: Figure 2