Ion source, support base, suspension mechanism, ion source transport system, and ion source transport method

摘要

The purpose of the present invention is to transfer an ion source in a reliably stable state. According to the present invention, an ion source comprises: a case (10) which is provided with an ion outlet port (O); an electrode holding member (50) which is connected to the case (10) to hold at least one electrode; and a lower roller (21) and an upper roller (22) which are detachably attached to the case (10) in an attaching posture. In a standing posture including the attaching posture in a state of being removed from a device body (102), only the lower roller (21) attached to the case (10) is disposed on a horizontal rail (23) so as to be able to roll. In a lodging posture, a height of which is lower than a height of the standing posture, both of the lower roller (21) and the upper roller (22) attached to the case (10) are disposed on the horizontal rail (23).