ION SOURCE SUPPORT MEMBER SUSPENSION MECHANISM ION SOURCE TRANSFER SYSTEM AND ION SOURCE TRANSFER METHOD

摘要

So that the ion source can be reliably transported in a stable state. An electrode holding member 50 connected to the case 10 and holding at least one electrode and a case 10 which is detachably attached to the case 10 in an attaching posture Only the lower roller 21 attached to the case 10 is supported on the horizontal rail 23 in the standing posture with the lower roller 21 and the upper roller 22 removed from the apparatus main body 102 Both of the lower rollers 21 and the upper rollers 22 attached to the case 10 are disposed on the horizontal rails (not shown) 23).