Method for forming at least one layer of film for solid phase thin film battery, plasma powder injection apparatus used for the film forming method, and solid phase thin film battery

摘要

Provided is a method of forming at least one layer (32) of a film for a solid-state thin film battery (100) by a plasma powder injection method. Also provided is a plasma powder injection device (1) for forming at least one layer (32) of a film on a substrate (33) used in a solid-state thin film battery (100). The plasma powder injection apparatus includes a plasma generation region (10) for generating a plasma gas flow (13) using an energy source (15), and at least one mixing region disposed in the plasma gas flow (13). (20) Moreover, the solid-phase thin film battery (100) manufactured using the said method is provided. [Selection] Figure 5