DOUBLY-CURVED X-RAY SPECTRAL ELEMENT AND DEVICE USING THE SAME, AND MANUFACTURING METHOD FOR DOUBLY-CURVED X-RAY SPECTRAL ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a doubly-curved X-ray spectral element whose entire spectroscopic surface is contributed to dispersion and condensation, which does not generate scattered light causing increase in background and has excellent dispersion performance and condensation performance, and in which irregular warp and crack do not occur on the spectroscopic surface.SOLUTION: A doubly-curved X-ray spectral element 1 is the one which is doubly curved in a concave shape with a first curvature &kgr;1 and a second curvature &kgr;2, and includes: an X-ray spectral member 7 on a rear surface 5 of which, opposite to a spectroscopic surface 4 for dispersing an X-ray, a plurality of grooves 6 are formed so as to run along a curving direction of the first curvature &kgr;1 at less than 45° while having the neighboring grooves 6 arranged in non-parallel but not to form oblique cross; and a concave-shaped base 10 having a concave surface 10a which is doubly curved in the concave shape with the first curvature &kgr;1 and the second curvature &kgr;2. The rear surface 5 of the X-ray spectral member 7 is pressed and bonded to the concave surface 10a of the concave-shaped base 10.