ON-RESISTANCE MEASURING METHOD FOR SEMICONDUCTOR ELEMENT AND ON-RESISTANCE MEASURING DEVICE FOR SEMICONDUCTOR ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide on-resistance measuring method and device for a semiconductor element with high precision.SOLUTION: A process for measuring on-resistance of a semiconductor element comprises a step of measuring the on-resistance of a semiconductor element provided to a substrate portion on a first area 31 under the state that a substrate is sucked by at least one suction hole 4a located in the first area 31, but the substrate is not sucked by at least one suction hole 4a located in an area of the surface 4b from which the first area 31 is excluded, and a step of measuring the on-resistance of a semiconductor element provided to a substrate portion on a second area 32 under the state that the substrate is sucked by at least one suction hole located in a second area 32, but the substrate is not sucked by at least one suction hole 4a located an area of the surface 4b from which the second area 32 is excluded.