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Adaptive on-tool mass flow controller adjustment
Adaptive on-tool mass flow controller adjustment
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机译:自适应工具上质量流量控制器调整
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摘要
PROBLEM TO BE SOLVED: To provide a method for providing accurate mass flow controller flow-rate data for a non-manufacturing adjustment gas.;SOLUTION: A mass flow controller may be operated at a set point greater than 50%. Data may be recorded in a mass flow controller memory. The set point may then be changed to 0%. The recorded data may then be analyzed and one or more non-manufacturing adjustment gas correction algorithm parameters may be calculated. The one or more non-manufacturing adjustment gas correction algorithm parameters may be stored in the mass flow controller memory and subsequently used in at least one future mass flow controller operation involving the non-manufacturing adjustment gas.;COPYRIGHT: (C)2012,JPO&INPIT
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