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Adaptive on-tool mass flow controller adjustment

机译:自适应工具上质量流量控制器调整

摘要

PROBLEM TO BE SOLVED: To provide a method for providing accurate mass flow controller flow-rate data for a non-manufacturing adjustment gas.;SOLUTION: A mass flow controller may be operated at a set point greater than 50%. Data may be recorded in a mass flow controller memory. The set point may then be changed to 0%. The recorded data may then be analyzed and one or more non-manufacturing adjustment gas correction algorithm parameters may be calculated. The one or more non-manufacturing adjustment gas correction algorithm parameters may be stored in the mass flow controller memory and subsequently used in at least one future mass flow controller operation involving the non-manufacturing adjustment gas.;COPYRIGHT: (C)2012,JPO&INPIT
机译:要解决的问题:提供一种为非制造性调节气体提供准确的质量流量控制器流量数据的方法。解决方案:质量流量控制器的设定值可以大于50%。数据可以记录在质量流量控制器的存储器中。然后可以将设定点更改为0%。然后可以分析所记录的数据,并且可以计算一个或多个非制造调整气体校正算法参数。可以将一个或多个非制造调整气体校正算法参数存储在质量流量控制器存储器中,并随后在涉及非制造调整气体的至少一个未来质量流量控制器操作中使用。;版权所有:(C)2012,JPO&INPIT

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