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Internal stress layer formed single crystal member and the single crystal substrate manufacturing method
Internal stress layer formed single crystal member and the single crystal substrate manufacturing method
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机译:形成有内应力层的单晶构件和单晶基板的制造方法
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摘要
Being large relatively, it designates the monocrystal substrate production manner which can produce the thin monocrystal substrate easily and that the internal stress formation formation monocrystal component is offered as topic. Inside the monocrystal component, the surface of irradiation side of the monocrystal component (10t) from laser light is done by the fact that it condenses, the surface (10t) with only alienation the surface (10t) with parallel extending stress formation of the two-dimensional condition which is present (13u) inside it possesses the reforming formation formation monocrystal component (11) with.
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