首页>
外国专利>
LOW COST WIDE PROCESS RANGE MICROWAVE REMOTE PLASMA SOURCE WITH MULTIPLE EMITTERS
LOW COST WIDE PROCESS RANGE MICROWAVE REMOTE PLASMA SOURCE WITH MULTIPLE EMITTERS
展开▼
机译:具有多种辐射体的低成本全过程远程微波等离子体源
展开▼
页面导航
摘要
著录项
相似文献
摘要
A remote plasma source has an array of low cost microwave magnetron heads coupled to individual conical, horn or other microwave emitter antennas above a gas shower head of a workpiece processing chamber.
展开▼