PROCESS CHAMBER, METHOD OF PREPARING A PROCESS CHAMBER, AND METHOD OF OPERATING A PROCESS CHAMBER

摘要

Process chambers and methods of preparing and operating a process chamber are disclosed. In some embodiments, a method of preparing a process chamber for processing a substrate includes: forming a first barrier layer over an element disposed within a cavity of the process chamber, the element comprising an outgassing material; and forming, within the process chamber, a second barrier layer over the first barrier layer.