首页>
外国专利>
Terahertz time-domain spectroscopic ellipsometry system
Terahertz time-domain spectroscopic ellipsometry system
展开▼
机译:太赫兹时域光谱椭圆仪系统
展开▼
页面导航
摘要
著录项
相似文献
摘要
A terahertz time-domain spectroscopic ellipsometry system includes a sample stage, a terahertz emitter configured to provide pulses of terahertz radiation with preselected polarization components to illuminate a sample on the sample stage along an incident direction, and a coherent terahertz detection system arranged to coherently detect pulses of terahertz radiation from the terahertz emitter along an emerging direction after at least one of reflecting from or passing through the sample. The sample stage is rotatable to vary a relative angle between the incident direction and the emerging direction, and the coherent terahertz detection system substantially maintains alignment for amplitude and polarization detection as the relative angle is varied.
展开▼